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详细介绍了微光学电子机械系统MOEMS领域的用于光学信号调制的微镜单元，分析了该微镜单元的工作原理及结构，推导了动态方程的有关参数，给出了仿真结果。首次提出了该结构前两阶频率的表达式，并与相应的有限元模态分析结果进行了比较。本文还对微镜的加工工艺作了简要介绍。
The micromirror unit for optical signal modulation in MOEMS is introduced in detail. The working principle and structure of micromirror unit are analyzed. Relevant parameters of dynamic equation are deduced and the simulation results are given. For the first time, the expression of the first two frequencies of the structure is proposed and compared with the corresponding finite element modal analysis results. This article also made a brief introduction of the micro-mirror processing technology.