在磁透镜后再加一级减速静电透镜,即推斥场构成的电磁复合推斥场物镜.它有较小的电子上靶能量和较小的像差,但是其综合指标难以构成完美的整机设计,实际应用较少.为了求解场分布和计算像差,曾进行了繁杂的工作.但无论什么设计方案,对物镜电源都提出了较高的稳定度要求,因电器性 After the magnetic lens plus a deceleration electrostatic lens, that is, the field of repulsion field composed of electromagnetic repulsion field objective lens. It has a smaller electron on the target energy and smaller aberrations, but its comprehensive index is difficult to form a perfect whole Machine design, the practical application less.In order to solve the field distribution and calculate the aberration, has carried out a complicated work.But no matter what the design scheme, the objective power supply have put forward a higher stability requirements, due to electrical