论文部分内容阅读
为了在制作垂直腔面发射激光器(VCSEL)时选择合适的氧化孔径尺寸,以获得较好的光束质量和较高的输出功率,对具有不同氧化孔径的单管器件的热特性进行了实验研究。通过控制氧化时间,制作了氧化孔径分别为415、386、316μm的单管器件,台面直径和P型接触电极直径均为450μm和400μm。针对3种器件在室温连续工作条件下不同的输出特性,对它们的热阻进行了实验测量,发现氧化孔径越小时器件热阻越大。通过对比电流、波长及温度的关系,得到了由电流引起的自热效应给3种器件带来的温升情况。注入电流为1A时,氧化孔径为415μm的器件温度为32.4℃,氧化孔径为386μm的器件温度为35.2℃,氧化孔径为316μm时,器件的温度高达76.4℃。
In order to select suitable aperture size for vertical cavity surface-emitting laser (VCSEL) to get better beam quality and higher output power, the thermal characteristics of single-tube devices with different oxidation apertures were studied experimentally. By controlling the oxidation time, single-tube devices with oxidation apertures of 415, 386 and 316 μm were fabricated. The diameters of mesa and P-type contact electrodes were both 450 μm and 400 μm. According to the different output characteristics of the three kinds of devices under continuous operating conditions at room temperature, the thermal resistances of the three devices were experimentally measured. The larger the thermal impedance of the device is, the smaller the oxidation aperture is. By comparing the relationship between current, wavelength and temperature, the temperature rise caused by self-heating current caused by three devices was obtained. When the injection current is 1A, the temperature of the device with the oxidation aperture of 415μm is 32.4 ℃, the temperature of the device with the aperture of 386μm is 35.2 ℃, and the temperature of the device with the aperture of 316μm is up to 76.4 ℃.