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用溶胶–凝胶法在石英基材上制备了纳米二氧化钛(TiO2)薄膜。用射频等离子体修饰TiO2薄膜。提出了射频等离子体使TiO2对光谱响应红移的修饰方法。X射线衍射分析结果表明:TiO2被等离子体修饰后仍然保持锐钛矿晶型。紫外–可见光谱分析结果表明:放电功率为400W时,TiO2薄膜的吸收边向可见光红移。Fourier变换红外光谱表明:等离子体修饰使TiO2薄膜的亲水性增强。电子自旋共振的结果表明:被修饰薄膜中Lande因子g=2.0003处氧空位俘获的电子的信号明显增强。放电功率为400W时,结晶紫溶液的光降解实验表明:等离子体修饰的TiO2的光催化活性较好。
Nanosized titania (TiO2) thin films were prepared on quartz substrates by sol-gel method. TiO2 Film Modified by RF Plasma. A modified method of radiofrequency plasma for the red shift of the spectral response of TiO2 is proposed. X-ray diffraction analysis results show that: TiO2 modified by the plasma still remain anatase crystal form. The results of UV-vis spectroscopy showed that the absorption edge of TiO2 film shifted to visible light with a discharge power of 400W. Fourier transform infrared spectroscopy showed that the plasma modification enhanced the hydrophilicity of TiO2 films. The results of electron spin resonance show that the signal of electron trapped by the oxygen vacancies at the Lande factor g = 2.0003 in the modified film is significantly enhanced. When the discharge power was 400W, the photodegradation experiments of crystal violet solution showed that the photocatalytic activity of plasma-modified TiO2 was better.