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本文提出了一种硅压阻式压力传感器校准和温度补偿的新思想,根据这种思想,把压阻惠斯顿电桥同可调的多晶硅电阻电路组合在同一芯片上,本文叙谜了这种传感器的设计、制作及其测最特性。
This paper presents a new concept of silicon piezoresistive pressure sensor calibration and temperature compensation, according to this idea, the piezoresistive Wheatstone bridge with adjustable polysilicon resistance circuit combination on the same chip, this article recapitulates this Sensor design, production and measurement of the most features.