【摘 要】
：
以乙醇锂和乙醇钽为起始反应物,用溶胶-凝胶法在Pt/Ti/SiO2/Si衬底上制备了新型钽酸锂LiTa3O8铁电薄膜.经XRD图谱对比,该薄膜结构不同于LiTaO3晶体结构,与正交相结构类似.SEM
【机 构】
：
电子科技大学机电工程学院,中国民航飞行学院航空工程学院,江苏工业学院信息科学系
论文部分内容阅读
以乙醇锂和乙醇钽为起始反应物,用溶胶-凝胶法在Pt/Ti/SiO2/Si衬底上制备了新型钽酸锂LiTa3O8铁电薄膜.经XRD图谱对比,该薄膜结构不同于LiTaO3晶体结构,与正交相结构类似.SEM分析显示经过750℃结晶退火的LiTa3O8薄膜表面均匀平整无裂纹,膜厚约为1μm.实验结果表明,在450kV/cm时,LiTa3O8薄膜剩余极化强度Pr为9.3μC/cm^2,矫顽场强Ec为126.8kV/cm;在9.SkV/cm时,LiTa3O8薄膜漏电电流为8.85×10^-9A/cm^2,比L
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