Defects of polymer-derived Si-C-O fibers were intensively studied by the SEM and TEM techniques and their originations were also discussed on the basis of factors experiments.The defects were found mainly in the form of strumaes,pits and splits on surfaces as well as microflaw networks,porosity clusters and inclusions in the bulk.Factors experiments reveal that a nonuniform or an insufficient curing would result in larger-sized strumaes or interior microflaws.Gas evolution rates due to different firing rates have a great influence on the formation of internal microflaws or porosity clusters and some oxidation-induced pits or splits may be formed on surfaces because of a trace of oxygen or water vapor accumulated from the flowing inert atmosphere during pyrolysis. Defects of polymer-derived Si-CO fibers were intensively studied by the SEM and TEM techniques and their originations were also discussed on the basis of factors experiments. The defects were found mainly in the form of strumaes, pits and splits on surfaces as well as microflaw networks, porosity clusters and inclusions in the bulk. Factors experiments reveal that a nonuniform or an insufficient cure would result in larger-sized strumaes or interior microflaws.Gas evolution rates due to different firing rates have a great influence on the formation of internal microflaws or porosity clusters and some oxidation-induced pits or splits may be formed on surfaces because of a trace of oxygen or water vapor accumulated from the flowing inert atmosphere during pyrolysis.