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对微位移工作台升降运动的精确控制是实现大规模集成电路中薄膜台阶高度测量自动化的关键。本文介绍了一种新型的微位移工作台升降模糊控制系统，它具有亚微米级的运动精度，保证了工作台升降快速、准确，运行平稳，对触针无冲击。在台阶高度测量中，应根据被测样品材料选择适当的测量力，该文测量力的设定是通过工作台上升或下降到相应位置来完成的。实验表明：工作台上升时间仅１０ｓ左右，测量力设定误差小于６μＮ。
The precise control of the micro-displacement worktable lifting motion is the key to automate the measurement of the film step height in large scale integrated circuits. This paper introduces a new type of micro-displacement table lift fuzzy control system, which has sub-micron level of movement accuracy, to ensure that the table lift fast, accurate, stable operation, no impact on the stylus. In the step height measurement, the appropriate measurement force should be selected according to the sample material to be measured. The setting of the measurement force is done by the table being raised or lowered to the corresponding position. Experiments show that the rise time of workbench is only about 10s, and the setting error of measuring force is less than 6μN.