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八十年代初问世的扫描隧道显微镜Scanning Tunneling Micrdscope(简称STM)是一种新型表面观测仪器。在三维空间都达到原子分辨率,对样品无任何破坏性以及可在超高真空、大气甚至液体中工作等独特优点使其在短短几年里得到了飞速发展并获得了广泛应用。。为进一步提高STM性能,扩大应用领域,本文将讨论一种大范围高分辨扫描隧道显微镜。分辨率和扫描范围是衡量STM性能的两个主要技术指标。目前绝大多数具有原子分辨率的STM,最大扫描范围局限在1微米左右,主要用于原子或纳米尺度下观察结构均匀的材料表面。但是,实际应用中存在的以下几个问题显露了现有STM扫描范围小的不足以及研制大范围高分辨STM的必要。第一、
Scanning Tunneling Microscope introduced in the early 1980s Scanning Tunneling Micrdscope (STM) is a new type of surface observation instrument. The unique advantages of atomic resolution in three dimensions, no destructiveness of the sample, and working in ultra-high vacuum, the atmosphere and even liquids have led to rapid development and widespread use in just a few years. . In order to further improve the STM performance and expand the application area, this article will discuss a wide range of high-resolution scanning tunneling microscope. Resolution and scan range are two of the major metrics for measuring STM performance. At present, most of the STMs with atomic resolution are limited to a maximum scanning range of about 1 micron, and are mainly used for observing the surface of a uniform structure at an atom or a nanoscale. However, the following problems existing in practical applications reveal the shortcomings of the existing STM scanning range and the necessity of developing a large-scale high-resolution STM. the first,