用俄歇(Auger)电子能谱技术作样品深度成分分析,是一种有效的方法.近几年来,采用球坑技术制备样品深度剖面,特别是制备深度大于1μm时,取得较好效果[1].球坑技术还可用来制备透射电镜的样品,如硬质材料陶瓷的样品,过去,这种非金属材料样品在预磨至30μm后,还要用离子轰击减薄的 The Auger electron spectroscopy technique is an effective method for the analysis of the depth of the sample, and in recent years, the use of the ball pit technology to prepare the sample depth profile, especially when the preparation depth is greater than 1μm, Ball pit technology can also be used to prepare TEM samples, such as hard material ceramic samples, in the past, this non-metallic material sample pre-ground to 30μm, but also reduced by ion bombardment