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根据桥式放大机构和平行四边形导向机构相结合设计了一种新型的垂直运动精密微定位平台。利用卡式定理推导了微定位平台的最大行程、刚度及放大比,利用拉格朗日方程推导了微定位平台的动力学模型及其固有频率。采用有限元仿真软件分析微定位平台的动静力学特性,并与理论分析结果进行对比,两者结果吻合良好。制造了微定位平台的原型样机,并进行了实验验证,实验结果表明:垂直运动精密微定位平台的行程可达112.9μm,闭环分辨率为10 nm,可以用于显微镜聚焦系统的微调等垂直定位精度较高的场合。
According to the combination of bridge amplification mechanism and parallelogram guide mechanism, a new type of vertical movement precision micro-positioning platform is designed. The maximum travel, stiffness and magnification ratio of micro-positioning platform are deduced by the card-type theorem. The dynamic model of micro-positioning platform and its natural frequency are deduced by Lagrange’s equation. The finite element simulation software is used to analyze the static and dynamic characteristics of the micro-positioning platform. The results are in good agreement with the theoretical analysis. The prototypical prototype of micro-positioning platform was fabricated and verified by experiments. The experimental results show that the vertical motion precision micro-positioning platform can reach 112.9μm and the closed-loop resolution is 10 nm. It can be used for vertical alignment such as fine tuning of microscope focusing system High-precision occasions.