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介绍采用参考压电振动干涉法研制开发的高精表面粗糙度光学轮廓仪(2D-SROP—1)。本文在阐述其工作原理之后。叙述了压电振动相移器PZT及其驱动器的设计与实现。
A 2D-SROP-1 high profile surface roughness optical profilometer developed with reference to piezoelectric vibration interferometry is introduced. This article after explaining its working principle. Describes the design and implementation of piezoelectric vibration phase shifter PZT and its driver.