论文部分内容阅读
本文前一部分给出一个实用SEM(扫描电镜)图形,波形的存贮、提取及处理的装置及软件程序。该程序适用于IBM-Pc/XT个人电脑及其兼容机,采用菜单方式给出:1.存贮一个扫描电镜图形;2.从电脑中提取一个存贮的图形;3.存贮电镜中几个线扫波形图;4.存贮任意频率(<50kHz)的几组(<4)波形;5.从电脑中提取所希望的任意波形;6.反复显示几个(<3)已存贮在电脑中的图形等六种功能。第二部分给出大规模集成电路检测中的图形存贮情况,并给出了打印结果。
The first part of this article gives a practical SEM (scanning electron microscope) graphics, waveform storage, extraction and processing devices and software programs. The program applies to IBM-Pc / XT personal computers and compatible machines, using the menu given: 1 storage of a SEM image; 2 from the computer to extract a stored graphics; (4) to store arbitrary frequency (<50kHz) of the group (<4) waveform; 5. Extract the desired arbitrary waveform from the computer; 6. Repeatedly display a few (<3) has been stored In the computer graphics and other six functions. The second part gives the graphic storage in large scale integrated circuit testing, and gives the printing result.