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一、引言低温等离子体是一种非热平衡态的物质。其中的电子能量达几个电子伏特,相当干～10~4～10~5K。而作为系统质量主体的气体分子的温度仅数十至数百摄氏度。这一状态的出现是由于电子与气体分子间质量相差悬殊,电子通过弹性碰撞传给分子的能量极少。所以可以把低温等离子体看作是在“冷”的母体中包含着高能量的粒子。电子是系统中最活跃的组分,是能量传递的媒介。它们通过与气体分子的非弹性碰撞,把电能转化为气体分子的势能,使分子电离,分解或激发,成为高活性的物质,从而把化学反应温度大大降低。因此,在低温等离子体中电子能量及其密度的测定就成为分析系统中化学反应的最基本的参数。
I. INTRODUCTION Low-temperature plasma is a kind of non-thermal equilibrium material. One of the electronic energy of several electron volts, quite dry ~ 10 ~ 4 ~ 10 ~ 5K. While the temperature of gas molecules that are the main body of the system is only tens to hundreds of degrees Celsius. The appearance of this state is due to the great difference between the mass of electrons and gas molecules, and the extremely small amount of energy that electrons pass to molecules through elastic collision. So you can think of a low-temperature plasma as a “cold” precursor that contains high-energy particles. Electrons are the most active component of the system and the medium of energy transfer. By their non-elastic collision with gas molecules, they convert electric energy into the potential energy of gas molecules, and ionize, decompose or excite the molecules to become highly active substances, so that the chemical reaction temperature is greatly reduced. Therefore, the determination of electron energy and its density in low temperature plasma becomes the most fundamental parameter for the chemical reaction in the analytical system.