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研制出用于现代光通信密集波分复用(DWDM)系统的微型谐振环波分复用器(MRRWM)。微环与信道波导采用垂直耦合的方式,利用耦合模理论对器件参数进行了优化设计,设计出模板,并研制出符合器件光学性能要求的聚合物材料。利用反应离子刻蚀技术完成了硅基板上单级和八级的器件制作,波分复用器的中心波长为1.55μm,输出波长间隔Δλ=1.6 nm,中心微环半径R=131.95μm,相邻微环半径差ΔR=500.0 nm,器件测试结果表明实现了微环谐振输出。
A miniature resonant-ring wavelength division multiplexer (MRRWM) is developed for modern optical communications DWDM systems. The micro-ring and channel waveguide are vertically coupled. The coupled-mode theory is used to optimize the parameters of the device. The template is designed and the polymer material that meets the optical performance requirements of the device is developed. The reactive ion etching technique was used to fabricate single-stage and eight-stage devices on a silicon substrate. The wavelength of the wavelength division multiplexer was 1.55μm. The output wavelength interval was Δλ = 1.6 nm, the central microring radius was R = 131.95μm, The difference between the adjacent micro-ring radius ΔR = 500.0 nm, the device test results show that the micro-ring resonant output.