基于MEMS膜片的光纤声传感器分析(英文)

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提出了一种新的应用于低频声传感领域的强度调制型光纤传感器理论模型。该模型使用了单模光纤来传输和接收光信号,使用了C-lens光学透镜实现光准直作用,讨论了光在准直透镜中的传播规律,利用准直器耦合损耗相对角度变化最为敏感的特征实现光强调制。强度型光纤传感器采用微电机系统(MEMS)结构的压力振动膜片拾取振动位移,通过分析施加在膜片上压力的变化得到影响光纤低频声传感器灵敏度的相关参数。仿真结果表明,选择合适的参数可以使传感器的灵敏度较传统方法有量级的提高,实验结果也说明了理论建模的可行性。 A new theoretical model of intensity-modulated optical fiber sensor used in low-frequency acoustic sensing is proposed. The model uses a single-mode fiber to transmit and receive optical signals, uses a C-lens optical lens to achieve light collimation, discusses the propagation of light in a collimating lens, and is most sensitive to changes in the relative angle of collimator coupling loss The characteristics of light intensity modulation. The intensity optical fiber sensor adopts the vibrating diaphragm of the MEMS vibrating diaphragm to pick up the vibration displacement, and obtains the relevant parameters that affect the sensitivity of the optical fiber low-frequency acoustic sensor by analyzing the change of the pressure applied on the diaphragm. The simulation results show that the sensitivity of the sensor can be increased by orders of magnitude compared with the traditional method by selecting suitable parameters. The experimental results also show the feasibility of theoretical modeling.
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