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应用基于表面硅、体硅微电子工艺的混合微加工技术 ,制作了新型 2× 2扭转微镜光开关阵列 ,并研究了其在外加静电场和交变电场中的机电特性 .当该光开关中悬挂多晶硅微镜的弹性扭转梁的厚度约为 1μm时 ,驱动微镜以实现其“开”状态的拐点静电电压为 2 70～ 2 90V ,而维持微镜“开”状态的最低保持电压在 5 5V左右 .理论分析表明 ,在关于该光开关结构的一系列设计参数中 ,拐点静电电压对于弹性扭转梁的厚度最敏感 .该光开关的开关寿命超过 10 8次 ,而其开关时间预计小于 2ms .对单片集成制造在该光开关阵列芯片上的两种新型光纤自定位保持结构的力学分析表明 ,它们具有光纤自固定、自对准的性质 .
A novel 2 × 2 torsion micromirror optical switch array was fabricated by hybrid micromachining technology based on surface silicon and bulk silicon microelectronics process, and its electromechanical properties in applied electrostatic field and alternating electric field were studied. When the optical switch When the thickness of the elastic torsion beam in the suspension polycrystalline micromirror is about 1 μm, the electrostatic voltage at the inflection point for driving the micromirror to be in the “on” state is 2 70-2 90 V while the minimum holding voltage for maintaining the micromirror “on” 5 V. The theoretical analysis shows that the knee point electrostatic voltage is the most sensitive to the thickness of the elastic torsion beam in a series of design parameters about the optical switch structure.The switch life of the optical switch is more than 108 times and its switching time is expected to be less than 2ms. The mechanical analysis of two new self-retaining structures of optical fiber on monolithically fabricated optical switch array chips shows that they have self-fixing and self-aligning properties.