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采用0.18μm GeSi BiCMOS工艺,通过调节中心抽头位置、设计八边形螺旋电感、添加屏蔽层、优化线圈外径与金属线宽等方法,设计了一种平衡性好、插入损耗小的片上巴伦。创新性地在HFSS模型中引入GSG焊盘,避免了去嵌入处理的复杂计算与计算误差。仿真结果表明:在500 MHz频率处,电路的插入损耗为3.5dB,幅度不平衡度为0.13dB,相位不平衡度为0.38°;在4GHz频率处,插入损耗为1.8dB,幅度不平衡度为1.62dB,相位不平衡度为2.85°。对样品的S参数幅度及相位进行测试,实测结果与仿真值吻合。该巴伦可应用于500 MHz~4GHz的超宽带正交调制器中,具有较好的应用前景。
By using the 0.18μm GeSi BiCMOS process, a well-balanced and low insertion loss on-chip balun was designed by adjusting the center tap position, designing an octagonal spiral inductor, adding a shielding layer, optimizing the coil outer diameter and metal line width, . Introducing GSG pads innovatively into the HFSS model avoids the complex computational and computational errors of the de-embedding process. The simulation results show that the insertion loss of the circuit is 3.5dB at 500MHz, the amplitude unbalance is 0.13dB and the phase unbalance is 0.38 °. At 4GHz, the insertion loss is 1.8dB and the amplitude unbalance is 1.62dB, the phase unbalance is 2.85 °. The S-parameter amplitude and phase of the sample are tested, the measured results are in good agreement with the simulation value. The balun can be applied to ultra-wideband quadrature modulator from 500 MHz to 4 GHz and has good application prospect.