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通过界面有效吸收系数的计算及界面对腔模的反射率的影响可知,采用双面键合技术制备面发射激光器应使键合界面处于驻波场分布零点位置,同时界面厚度应该小于20nm以使器件光学性能受界面吸收系数的影响较小.采用有限元方法分析VCSEL温度分布,结果证实薄的键合界面使VCSEL有源区温度对界面的热导率和电导率改变不敏感,而厚的键合界面将可能使有源区温度有较大地升高,给器件带来严重的不良影响.亲水键合和疏水键合的SEM照片说明疏水处理界面较薄,适合用于器件的制备.而亲水处理界面厚度>40nm,对器件的光、热特性不利.
Through the calculation of the effective absorption coefficient of the interface and the influence of the interface on the reflectivity of the cavity mode, it can be seen that the bonding interface should be at zero position of the standing wave field and the thickness of the interface should be less than 20 nm in order to make the surface emitting laser by double-sided bonding The optical performance of the device is less affected by the absorption coefficient of the interface.Using the finite element method to analyze the temperature distribution of the VCSEL, the results show that the thin bonding interface makes the VCSEL active region temperature insensitive to the interface thermal conductivity and conductivity change, The bonding interface may increase the temperature of the active region greatly, which will have a serious adverse effect on the device.The SEM pictures of hydrophilic bonding and hydrophobic bonding show that the interface of hydrophobic bonding is thin and suitable for device fabrication. Hydrophilic treatment interface thickness> 40nm, the device’s light and thermal characteristics of negative.