论文部分内容阅读
荧光X射线基本参数法既具有荧光X射线的优点,也具有基本参数法的特点.既不使用标准样品,也不绘制标准曲线.只用一个“无穷厚”样品,运用基本参数公式,采用“LAMA”程序,通过电子计算机的计算来完成.本文介绍了用这种方法来测定钛膜厚度.它包括理论依据及计算方法、实验验证、分析讨论.本方法测量稳定、数据可靠、实用、先进.在膜厚为100—1000(?)的范围内,绝对误差小于60(?),平均相对误差在6%以内.给出了厚度在100—1,000(?)、1,000—10,000(?)、10,000—100,000(?)范围内的厚度和对应的强度比之值,以供参考使用.类似的纯元素薄膜,包括电镀层的厚度测定,也可采用本法.
The basic parameters of fluorescence X-ray method not only have the advantages of fluorescence X-ray, but also have the characteristics of the basic parameters of the method. Neither standard nor standard curve. Only one “infinite thickness” sample, the use of basic parameters formula, the use of “ LAMA ”program, which is completed by computer calculation.This paper introduces the method to determine the thickness of titanium film.This method includes theoretical basis and calculation method, experimental verification, analysis and discussion.The method is stable, reliable, practical, advanced In the range of 100-1000 (?), The absolute error is less than 60 (?) And the average relative error is within 6% For the purpose of reference, the thickness in the range of 10,000 - 100,000 (?) And the corresponding intensity ratio may also be used for similar pure elemental films, including the thickness of plating layers.