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近场扫描光学显微技术与Raman光谱技术的结合能够在纳米尺度下提供化学 /结构信息 ,这对很多应用都是至关重要的 ,比如硅器件 ,纳米器件 ,量子点及生物样品单分子研究。本文报导了采用无孔径探针的近场Raman研究。我们的系统有两大特征 :1 近场Raman的增强是通过金属探针上的银镀层实现的 ,无需样品准备 ;2 系统在反射模式下工作 ,适用于任何样品。这两点对实际应用是至关重要的。我们首次在实际硅器件上用 1秒积分时间获得了 1维近场Raman映射和 2维近场Raman图象。我们首次展示了由于积分时间短 ,该技术可用于成象用途。因此 ,这是近场扫描Raman研究中的一次巨大进步。此外 ,我们系统中采用的金属探针可同时用于AFM及电学特性成象 ,比如电阻 ,电容 ,这些是器件应用中的重要参数。
The combination of near-field scanning optical microscopy and Raman spectroscopy provides chemical / structural information at the nanoscale, which is crucial for many applications such as silicon devices, nanodevices, quantum dots, and single-molecule studies of biological samples . In this paper, a near-field Raman study using non-porous probes is reported. Our system has two main characteristics: 1 Near-field Raman enhancement is achieved by silver plating on metal probes without sample preparation. 2 The system works in reflection mode and is suitable for any sample. These two points are crucial to the practical application. For the first time, we obtained 1-D near-field Raman maps and 2-dimensional near-field Raman images with 1 second integration time on real silicon devices. For the first time, we show that due to the short integration time, this technique can be used for imaging purposes. Therefore, this is a huge improvement in the near field scanning Raman study. In addition, the metal probes used in our system can be used for both AFM and electrical imaging, such as resistance and capacitance, which are important parameters in device applications.