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Two sapphire substrates were tightly bonded by irradiation with a 1064 nm nanosecond laser and using a sputtered 50 nm-titanium thin film as an absorbing medium.Upon laser irradiation,aluminum from the upper substrate is incorporated into the thin film,forming Ti-Al-O compounds.While the irradiated region becomes transparent,the bond quality was evaluated by scanning acoustic microscopy.
Two sapphire substrates were bonded with a 1064 nm nanosecond laser and using a sputtered 50 nm-titanium thin film as an absorbing medium. Since laser irradiation, aluminum was incorporated into the thin film, forming Ti-Al- O compounds. Whilst the irradiated region becomes transparent, the bond quality was evaluated by scanning acoustic microscopy.