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利用高真空磁控溅射仪制备了不同Cu含量的NbCN-Cu复合膜。采用X射线光电子能谱、X射线衍射仪、纳米压痕仪、扫描电镜、三维形貌仪和摩擦磨损仪对薄膜的微观结构、力学性能以及摩擦磨损性能进行了分析。结果表明,NbCN-Cu复合膜为面心立方δ-NbN、六方δ’-NbN和单质Cu相三相共存结构。随Cu含量增加,NbCN-Cu复合膜的硬度值先缓慢上升再迅速下降,Cu含量为2.27%时,获得最大硬度,为31.43 GPa。室温下,随Cu含量的增加,NbCN-Cu复合膜的摩擦系数先缓慢上升再快速上升,磨损率先缓慢下降再快速上升。当温度从室温温度上升到500℃,不同Cu含量的NbCN—Cu的摩擦系数均先升高后降低,磨损率逐渐上升,温度一定,Cu含量越高,磨损率越高;300~500℃内,温度一定,Cu含量越高,NbCN-Cu复合膜的摩擦系数越低。
NbCN-Cu composite films with different Cu contents were prepared by high-vacuum magnetron sputtering. The microstructure, mechanical properties and friction and wear properties of the film were analyzed by X-ray photoelectron spectroscopy, X-ray diffraction, nanoindentation, scanning electron microscopy, three-dimensional topography and friction abrasion tester. The results show that the NbCN-Cu composite film is a face-centered cubic δ-NbN, a hexagonal δ’-NbN and a simple Cu-phase coexisting structure. With the increase of Cu content, the hardness value of NbCN-Cu composite film firstly increases slowly and then decreases rapidly. When Cu content is 2.27%, the hardness of NbCN-Cu composite film reaches 31.43 GPa. At room temperature, with the increase of Cu content, the friction coefficient of NbCN-Cu composite film increases slowly and then increases rapidly, and the wear rate decreases slowly and then increases rapidly. When the temperature rises from room temperature to 500 ℃, the friction coefficient of NbCN-Cu with different contents of Cu increases first and then decreases, the wear rate gradually increases. The higher the Cu content is, the higher the wear rate is. , A certain temperature, the higher the Cu content, the lower the friction coefficient of the NbCN-Cu composite film.