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提出了一种快速自动测试光栅光谱衍射效率的新方法。重点推导了测试平面光栅绝对光谱衍射效率与相对光谱衍射效率公式,介绍了双光束高精度自动测试光栅光谱衍射效率曲线的基本原理、方案与方法,并分析了测试精度。研究表明,本方案的测试速度和精度均比一般测试方法提高一倍,并能有效地消除光源波动对测量结果的影响,测量误差小于5×10-3。
A new method to quickly and automatically test the grating diffraction efficiency is proposed. The formula of absolute spectrum diffraction efficiency and relative spectrum diffraction efficiency of the test grating is deduced. The basic principle, scheme and method of automatically measuring the grating diffraction efficiency curve with double beam are introduced. The test precision is also analyzed. The research shows that the speed and precision of this scheme are doubled compared with the common test method, and the influence of light source fluctuation on the measurement results can be effectively eliminated. The measurement error is less than 5 × 10-3.