【摘 要】
：
In this work, n-type amorphous silicon oxide thin films were deposited by RF-PECVD method using a gas mixture of SiH4, CO2, H2, and PH3. The deposition rate, re
【机 构】
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Laboratory of Thin Film Materials, College of Materials Science and Engineering, Beijing University
【出 处】
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Journal of Wuhan University of Technology(Materials Science
论文部分内容阅读
In this work, n-type amorphous silicon oxide thin films were deposited by RF-PECVD method using a gas mixture of SiH4, CO2, H2, and PH3. The deposition rate, refractive index, band gap, crystalline volume fraction, and conductivity of the silicon oxide thin films were determined and analyzed. The film with refractive index of 1.99, band gap of 2.6e V and conductivity of 10-7 S/cm was obtained, which was suitable for the intermediate refl ector layer.
In this work, n-type amorphous silicon oxide thin films were deposited by RF-PECVD method using a gas mixture of SiH4, CO2, H2, and PH3. The deposition rate, refractive index, band gap, the silicon with thin films were determined and analyzed. The film with refractive index of 1.99, band gap of 2.6e V and conductivity of 10-7 S / cm was obtained, which was suitable for the intermediate refl ector layer.
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