,Design, fabrication and characterization of a high-performance microring resonator in silicon-on-in

来源 :中国物理B(英文版) | 被引量 : 0次 | 上传用户:winterdxm7124
下载到本地 , 更方便阅读
声明 : 本文档内容版权归属内容提供方 , 如果您对本文有版权争议 , 可与客服联系进行内容授权或下架
论文部分内容阅读
A high-performance microring resonator in a silicon-on-insulator rib waveguide is realized by using the electron beam lithography followed by inductively coupled plasma etching. The design and the experimental realization of this device are presented in detail. In addition to improving relevant processes to minimize propagation loss, the coupling efficiency between the ring and the bus is carefully chosen to approach a critical coupling for high performance operating. We have measured a quality factor of 21, 200 and an extinction ratio of 12.5dB at a resonant wavelength of 1549.32nm. Meanwhile, a low propagation loss of 0.89dB/mm in a curved waveguide with a bending radius of 40μm is demonstrated as well.
其他文献
This paper solves exactly a set of fully quantized coupled equations describing the quantum dynamics of quantum spins mixing in spin-1 Bose-Einstein condensates
This paper proposes an alteative scheme for generating duster-type of entangled coherent states.This scheme is based on resonant interaction of a two-mode cavit
壮语中表示性别的词比较丰富。有些量词兼有表示性别的功能;有些量词是 从表示性别的词中分化出来的。作者认为,表示性别的词?dak8“公”和 me6“母”是 壮语最初用来表示性别的词。 W
The phase behaviour of a single polyethylene chain is studied by using molecular dynamics simulations. A free chain and a chain with fixing one end axe consider
In this work, diamond-like carbon (DLC) films were deposited on stainless steel substrates with Si/SiC intermediate layers by combining plasma enhanced sputteri
本文通过对彝族古地名ma21 ne33 zi21 tshi33(玛纳液池)的释义及其来历的考释,认为彝文《指路经》中所提到的这个地名是云南昭通土城镇葡萄井对面至今仍被称为“木乃依曲”的
This paper introduces a novel method to realize the superposition of orbital angular momentum of photons by combined computer-generated hologram (CCGH) fabricat
Rehybridization of electronic orbitals in carbon nanotubes contains tilting angles of π orbital, electrons wavefunc-tions of π orbital and σ orbital, degrees
A series of Mn-doped ZnO films have been prepared in different sputtering plasmas by using the inductively coupled plasma enhanced physical vapour deposition. T