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阐述高精度激光准直系统的总体构成及特点,着重分析高斯激光束经过薄透镜的变换规律、最佳准直区域以及激光准直光学系统的设计思路。给出系统光电接收转换元件的主要技术参数、直线度误差测评软件的设计方法和用于高精度激光准直系统实现直线度误差的静态、动态测量方法和直线度误差的主要评定方法。利用开发的测评软件,对系统进行了实验测试,给出了实验结果,并对该系统的应用作了展望。
The general composition and characteristics of the high precision laser collimation system are expounded. The changing law of the Gaussian laser beam passing through the thin lens, the optimal collimation area and the design idea of the laser collimation optical system are emphatically analyzed. The main technical parameters of the photoelectric conversion element, the design method of the linearity error evaluation software and the static and dynamic measurement methods for the linearity error of the high precision laser collimation system and the main evaluation methods of the linearity error are given. Using the developed evaluation software, the system was tested experimentally, the experimental results were given, and the application of the system was prospected.