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结合神光Ⅱ升级装置腔空间滤波器远场准直的特点,通过建立孔间耦合模型,提出了一种孔间前馈补偿和孔内反馈调节相结合的多孔串并行综合准直控制方法。该方法通过位置预估和局部极值搜索来实现所有基准中心的提取,并依据图像Jacobian矩阵,计算各反射镜电机的反馈控制量。将前孔准直调节量作为后孔准直扰动,并利用孔间耦合模型计算出后孔准直所需的前馈扰动补偿控制量,综合反馈控制量和前馈补偿量实现多孔的串并行准直调节。实验结果表明,基准中心的识别准确率达到97%以上,准直时间由约1 min缩短至30 s左右,在很大程度上提高了准直效率。
Combined with the characteristics of far-field collimation of cavity space filter in SG upgrade device Ⅱ, a multi-hole and parallel synthesis collimation control method based on the coupling between holes is proposed by combining the feedforward compensation and hole feedback control. In this method, all the reference centers are extracted by position estimation and local extremum search, and the feedback control of each mirror motor is calculated according to the Jacobian matrix. The collimation of the front hole is used as the collimation of the back hole collisions, and the feedforward disturbance compensation control amount needed by the back hole collimation is calculated by using the coupling between the holes. The combined feedback control amount and the feedforward compensation amount achieve the porous serial-parallel Alignment adjustment. The experimental results show that the recognition accuracy of the reference center is above 97% and the collimation time is shortened from about 1 min to about 30 s, which improves the collimation efficiency to a great extent.