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MEMS麦克风需要一个高于10V的偏置电压才能工作,这个高电压一般由内部电荷泵电路产生。在传统Dickson电荷泵结构的基础上,提出一种改进的电荷泵结构。它首先将非重叠时钟的幅度加倍,然后用幅度加倍的时钟作为电荷泵的驱动时钟,取得了明显的升压效果。Hspice仿真结果表明,电源电压为1.4V时,6级二极管-电容升压单元就可以实现10.7674V的输出电压。与传统的Dickson升压电路相比,改进型电荷泵的升压单元减少了4级,且其核心部分的面积减小了21%,功耗降低了40%(参考SMIC 0.35μm CMOS工艺)。
MEMS microphones require a bias voltage higher than 10V to work, this high voltage is generally generated by the internal charge pump circuit. Based on the traditional Dickson charge pump structure, an improved charge pump structure is proposed. It first doubled the amplitude of the non-overlapping clock and then doubled the amplitude of the clock as the charge pump’s driving clock to achieve a significant boosting effect. Hspice simulation results show that when the supply voltage is 1.4V, the 6-stage diode-capacitor boost unit can achieve 10.7674V output voltage. Compared with the traditional Dickson boost circuit, the improved charge pump boost unit has been reduced by 4 steps, with a 21% reduction in core area and 40% reduction in power consumption (refer to SMIC 0.35μm CMOS Process).