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亚波长光栅中的衍射需要使用矢量衍射理论进行分析,其衍射效率与多个因素有关,对任意面形、任意入射条件的亚波长光栅的衍射来说,使用严格的耦合波理论进行分析计算可以得到数值解。通过分析不同参数条件下的衍射特性和衍射效率对各个参数的敏感性,获得了对衍射效率影响最大的光栅参数——槽深。用接近衍射效率曲线的抛物线作为目标函数建立了适应度函数。使用遗传算法进行优化,得到了所期望的衍射效率滤波特性,从而完成了具有防伪功能的亚波长光栅的设计。
The diffraction in sub-wavelength grating needs to be analyzed by vector diffraction theory. The diffraction efficiency depends on many factors. For the diffraction of subwavelength gratings with arbitrary surface shape and arbitrary incident conditions, the analysis by using the rigorous coupled wave theory can calculate Get numerical solution. By analyzing the sensitivity of the diffraction characteristics and the diffraction efficiency to the parameters under different conditions, the grating parameter which has the greatest influence on the diffraction efficiency is obtained - the groove depth. The fitness function is established by using the parabola close to the diffraction efficiency curve as the objective function. The genetic algorithm was used to optimize the filter efficiency of the desired diffraction efficiency, thus completing the design of sub-wavelength grating with anti-counterfeit function.