论文部分内容阅读
本文阐述了用溶胶一凝胶法制备锆钛酸铅（ＰＺＴ）铁电薄膜的工艺参数对薄膜结构的影响。实验表明，采用合适的工艺参数能制备出具有钙钛矿型结构的ＰＺＴ铁电薄膜。
This article describes the influence of the process parameters on the thin film structure of the sol-gel PZT ferroelectric thin films. Experiments show that PZT ferroelectric thin films with perovskite structure can be prepared by using appropriate process parameters.