带筋片和凸台的高灵敏度压力传感器ＲａｌｐｈＨ．Ｊｏｈｎｓｏｎ等１．前言高灵敏度低非线性硅原阻压力传感器是人们长期为之奋斗的目标。但实现这个目标的方法已经有了改进，目前主要关心的是凸台方法。通常采用全厚度的凸台或接近全厚度的凸台以使加工过程简化。这些方... High Sensitivity Pressure Sensor with Ribs and Boss. Johnson et al. Preface High sensitivity low nonlinear silicon original resistance pressure sensor is the long-term goal for people. However, the method to achieve this goal has been improved. At present, the main concern is the boss method. Generally full-thickness bosses or bosses near full thickness are used to simplify the process. These parties ...