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本文介绍了一种声表面波器件的实用的修版方法,使用一台显微镜和一个结构简单的专用工具,即可实现声表面波器件的修版,排除用铝丝等引起的声表面波器件指条间的短路现象,从而提高了成品率,缩短了研制和生产周期,收到良好的经济效益。目前可修版的最小指条宽度和间隔均约为6μm。本方法对净化条件较差的研制和生产单位尤为实用。
This paper introduces a practical repair method of surface acoustic wave device, using a microscope and a special tool with simple structure, you can achieve a revision of surface acoustic wave devices, excluding the surface acoustic wave device caused by aluminum wire Short circuit between fingers, thereby increasing the yield, shorten the development and production cycle, received good economic benefits. The minimum width and spacing of the current minimum revision are about 6μm. The method is especially useful for the research and production units with poor purification conditions.