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介绍了基于阵列波导光栅(AWG)的单纤三向波分复用器的设计、仿真、制作与测试。利用阵列波导光栅的频谱周期性,采用越级衍射方法可在无需改变AWG布局,无需额外元件的情况下覆盖三向波分复用器的整个工作波段(1310~1550nm)。器件的芯层采用较高折射率的SU-8聚合物,下包层是二氧化硅,并用空气作为覆盖层,制作流程简单,只需要紫外光刻,成本低。仿真结果显示三个工作通道3dB带宽都大于11nm,偏振波长漂移不超过0.65nm。器件测试结果验证了越级衍射设计的正确性,在TM偏振态下的第二和第三波长通道的额外损耗是3dB左右,第一波长通道的额外损耗是7dB左右,串扰在-15dB左右。整个器件大小仅1.3mm×0.402mm。
The design, simulation, fabrication and testing of single fiber three-way wavelength division multiplexer based on arrayed waveguide grating (AWG) are introduced. Using the spectral periodicity of arrayed waveguide gratings, the over-run diffraction method can cover the entire operating band (1310-1550 nm) of the three-way wavelength division multiplexer without changing the AWG layout and without additional components. The core layer of the device uses SU-8 polymer with higher refractive index, the under-cladding layer is made of silicon dioxide and uses air as the covering layer. The fabrication process is simple, and only the UV lithography is needed, so the cost is low. The simulation results show that the 3dB bandwidth of the three working channels is greater than 11nm and the polarization wavelength shift does not exceed 0.65nm. Device test results validate the correctness of the extra-diffractive design. The extra loss of the second and third wavelength channels in TM polarization is about 3dB. The extra loss of the first wavelength channel is about 7dB and the crosstalk is about -15dB. The entire device size is only 1.3mm × 0.402mm.