一、引言近年来,真空计量学(Vacuum Metrology)这一术语越来越多地出现在真空技术的有关文献中,这标志着真空计量标准已发展到一个新的水平。在计量学中,所谓的计量标准,不仅是一台台孤立的仪器或设备,而应是一个完整的,统一的、有机的体系。建立国家级计量标准,要求以不同地区(或不同实验室)的相同类型(或不同类型)的计量标准之间相互校准作为基础。 I. INTRODUCTION In recent years, the term VacuumMetrology has been appearing more and more in the related literature of vacuum technology, which indicates that the vacuum measurement standard has been developed to a new level. In metrology, the so-called measurement standard is not only an isolated instrument or equipment, but a complete, unified and organic system. The establishment of national-level metrology standards requires that the same type (or different types) of metrological standards in different regions (or different laboratories) be calibrated to each other as a basis.