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介绍了TiC涂层的化学气相沉积工艺,TiC涂层材料的电子束热冲击实验和热疲劳试验。在温度为1100℃,CH_4流量为0.36L/min,H_2流量为1.16L/min的工艺条件下,得到了致密的TiC涂层,且沉积速率达0.7/μm/min,并给出了涂层厚度与工艺参数之间的经验关系式。在高功率密度(最大值达226MW/m~2,作用0.6s)电子束热冲击下,TiC涂层从基体(石墨、钼、316L不锈钢)脱落,且316L不锈钢基体被熔化、蒸发。在900℃到-246℃之间的热循环实验下,TiC/316L不锈钢表现出极差的抗疲劳特性,仅在2次热循环之后,就有大量TiC涂层从316L不锈钢基体脱落;虽然TiC/石墨的涂层中有大量网状裂纹形成,但是,在200次热循环之后,TiC涂层与基体仍结合很好;TiC/钼有很好的抗疲劳特性,在200次热循环之后,材料仍没有任何损伤。
The chemical vapor deposition process of TiC coating, electron beam thermal shock test and thermal fatigue test of TiC coating material are introduced. Under the conditions of 1100 ℃, CH_4 flow rate 0.36L / min and H_2 flow rate 1.16L / min, a dense TiC coating was obtained with a deposition rate of 0.7 / μm / min and a coating The empirical relationship between thickness and process parameters. At high power density (up to 226 MW / m 2, for 0.6 s), the TiC coating falls off the substrate (graphite, molybdenum, 316L stainless steel) and the 316L stainless steel substrate melts and evaporates. TiC / 316L stainless steel exhibited very poor fatigue resistance under thermal cycling experiments between 900 ° C and -246 ° C, with a large number of TiC coatings coming off the 316L stainless steel substrate only after 2 thermal cycles; although TiC However, after 200 thermal cycles, the TiC coating is still well bonded with the matrix. TiC / molybdenum has good anti-fatigue properties. After 200 thermal cycles, The material is still without any damage.