我们在北京仪器厂生产的DMD-450光学多层镀膜机上,配上以APPLE-Ⅱ微型机为核心的膜厚监控系统。本系统采用极值法原理通过检测和控制材料的蒸发速率,有机地使用“比较法”和“微分法”判断镀膜返转点。提高了极值点判断精度。还可控制扫描单色仪,进行波长扫描,显示并绘制相应膜层的光谱曲线,初步实现了光学多层镀膜的自动化,有效地提高了镀膜质量和成品率。 We DMD-450 optical multilayer coating machine produced in Beijing Instrument Factory, coupled with the APPLE-Ⅱ microcomputer-based film thickness monitoring system. The system uses the principle of extreme value by detecting and controlling the evaporation rate of the material, the organic use of “comparative method” and “differential method” to determine the coating turning point. Improve the accuracy of extreme point judgment. Also can control the scanning monochromator, wavelength scanning, display and draw the corresponding spectral curve of the film, the initial realization of the optical multilayer coating automation, effectively improve the coating quality and yield.