【摘 要】
：
Step-coupler waveguide-integrated Ge/Si avalanche photodetector (APD) is based on the vertical multimode interfer-ence (MMI), enhancing light scattering towards
【机 构】
：
State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of
论文部分内容阅读
Step-coupler waveguide-integrated Ge/Si avalanche photodetector (APD) is based on the vertical multimode interfer-ence (MMI), enhancing light scattering towards the Ge active region and creating mirror images of optical modes close to the Ge layer. However, there are two ineluctable contact angels between selectively epitaxial growth Ge and Si layers and selectively epitaxial growth Si and Si substrate, which has an effect on the coupling efficiency and the absorption of the photodetector. Therefore, step-coupled Ge/Si avalanche photodetectors with different step lengths are designed and fabricated. It is found that responsivity of APDs with step-coupler-length of 3.0 μm is 0.51 A/W at?6 V, 21％higher than that of 1.5 μm, which matches well with simulation absorption. The multiplication gain factor is as high as 50, and the maximum gain-bandwidth product reaches up to 376 GHz.
其他文献
我从来热爱乡村的冬天。我无法理解富翁们的情趣，他们在一年当中最不适于举行舞会、讲究穿着和奢侈挥霍的季节，将巴黎当作狂欢的场所。大自然在冬天邀请我们到火炉边去享受天伦
我省大豆面积大,近年来大豆始终徘徊在亩产90——100公斤的水平。1992年10月7—9日笔者在灵壁县韦集镇双龙村,为期3天,考察了该地大面积丰产的现场,得到了很大的启发。1315.
Electrical spin,which is the key element of spintronics,has been regarded as a powerful substitute for the electrical charge in the next generation of informati
河南省农科院研究员屠礼传等人组成的课题组经过10年攻关研究,选育出世界上第一个具有超强优势和实用价值的芝麻杂交种——83CA006,从而使利用杂交种提高芝麻产量的设想成为
L-半乳糖-1,4-内酯脱氢酶（GalLDH）是催化植物体内抗坏血酸生物合成最后一步的关键酶。本实验研究了正常生长条件下和Cu胁迫条件下Vc合成代谢过程相关酶的变化,并为利用基因工程
请下载后查看，本文暂不支持在线获取查看简介。
Please download to view, this article does not support online access to view profile.
Gas flow in a micro-channel usually has a high Knudsen number. The predominant predictive tool for such a micro-flow is the direct simulation Monte Carlo (DSMC)
汉语的词语结构有一定的规律,大都不可随意改动。但在十分丰富的汉语词汇当中,有些词语如果颠倒了字序,却仍然是一个词。有趣的是,所表达的意思有的不变,有的范围变窄,有的全
在一些谜语中,有一部分谜语是数学成语谜,猜这种谜语很有趣,不仅可以激发我们学习数学的兴趣,还能丰富我们的语文知识。数学成语谜一般包括算式谜、数字谜和方程谜。不管哪种
“截止”与“截至”是两个意义相近但用法不同的词。截止，是到某一时间停止，不再继续。截至，表示事情到某一时间为界，未必停止，还可继续。