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采用微波三探针研究了环形波导等离子体源阻抗特性随运行参数的变化。分析了微波等离子体源的阻抗特性。该方法有助于微波等离子体特性的研究和实现快速阻抗调配。
The impedance characteristics of a toroidal waveguide plasma source with the operation parameters were studied by using the microwave three probe. The impedance characteristics of the microwave plasma source are analyzed. This method contributes to the research of microwave plasma characteristics and to the realization of fast impedance matching.