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采用直流磁控溅射法在空心玻璃微珠表面镀Al膜,利用XRD和SEM研究了镀Al微珠的相结构和形貌。将镀Al微珠、未镀Al微珠与高分子粘合剂混合制得人工介质材料,利用网络分析仪测定其在8.2 12.4 GHz频率范围的介电性能。结果表明,采用磁控溅射方法可在玻璃微珠表面包覆金属Al膜,Al膜与基体的结合力较好。在镀铝微珠加入量相同的情况下,玻璃微珠表面铝膜越厚,则人工介质材料的介电常数越大。在Al膜厚度相同的情况下,镀Al微珠加入量越多,则人工介质材料的介电常数越大。所制备的人工介质材料介电损耗小于0.02,密度小于0.8 g/cm3。
The Al film was deposited on the surface of hollow glass beads by DC magnetron sputtering. The phase structure and morphology of the Al-plated beads were studied by XRD and SEM. The Al-coated microbeads, the uncoated Al microbeads and the polymeric binder were mixed to obtain the artificial medium material, and the dielectric properties of the medium in the frequency range of 8.2 12.4 GHz were measured by a network analyzer. The results show that the Al film can be coated on the surface of glass beads by magnetron sputtering. The bonding strength between Al film and substrate is good. In the case of the same amount of aluminized microbead, the thicker the aluminum film on the surface of the glass microbead, the larger the dielectric constant of the artificial medium material. In the case of the Al film having the same thickness, the larger the amount of the Al-plated microbead, the larger the dielectric constant of the artificial medium material. The prepared artificial medium has dielectric loss less than 0.02 and density less than 0.8 g / cm3.