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在研制成功的用于化学气体探测的热驱动微悬臂梁谐振器的基础上,提出了基于这种微悬臂梁谐振器,并以聚合物涂层作为挥发性有机化合物吸附敏感层的谐振式气体传感器.利用3种聚合物材料:聚氧化乙烯(PEO)、聚乙烯醇(PVA)和聚乙二醇乙醚醋酸酯(PEVA),在微悬臂梁谐振器上制备气体敏感层,探测6种挥发性有机化合物:甲苯、苯、乙醇、丙酮、己烷和辛烷.通过有限元分析估计了聚合物涂层的工作温度.用喷射法制备了PVA和PE-VA涂层,用点滴法制备了PEO涂层.测试了传感器的开环幅频特性,实验检测了气体传感器的谐振频率变化与分析物蒸气浓度的关系以及传感器对相对湿度的响应,分析了传感器的灵敏度和线性度.实验结果表明,这种涂覆聚合物敏感层的热驱动微悬臂梁谐振器为探测挥发性有机化合物提供了良好的平台.根据实验结果,可开发几种基于不同聚合物敏感层的高灵敏度微型气体传感器.
Based on the successful development of a thermally actuated micro-cantilever resonator for chemical gas detection, a resonant gas based on such a micro-cantilever resonator with a polymeric coating as a sensing layer for volatile organic compounds Sensor.A gas-sensitive layer was prepared on a micro-cantilever resonator using three kinds of polymer materials: PEO, PVA and PEVA, Organic compounds such as toluene, benzene, ethanol, acetone, hexane and octane were used.The working temperature of polymer coating was estimated by finite element analysis.PVA and PE-VA coatings were prepared by spray method and prepared by drop method PEO coating.The open-loop amplitude-frequency characteristics of the sensor were tested.The relationship between the resonance frequency of the gas sensor and the analyte vapor concentration and the response of the sensor to the relative humidity were measured and the sensitivity and linearity of the sensor were analyzed.The experimental results This thermally actuated micro-cantilever resonator coated with a polymer-sensitive layer provides a good platform for the detection of volatile organic compounds.According to the experimental results, several different polymer-sensitive Layer of high sensitivity micro gas sensor.