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制作无缺陷的CCD摄象器时需要在改进摄象器件工艺中鉴别缺陷的起因。在视频显示中,下列几种缺陷是经常观察到的:垂直和水平线、局部斑点和条纹。用光学显微镜、化学腐蚀和EBIC法(电子束感应电流)相结合,分析了它们的起因。证实它们与存在于氧化层和多晶硅中的缺陷、在加工中引入硅体内的缺陷以及存在于原始材料中的缺陷有关。详细讨论了它们和原始材料、器件加工步骤的关系以及它们在显示输出中的图象外貌与器件工作条件的函数关系。
The fabrication of a defect-free CCD camera requires identification of the cause of the defect in the process of improving the imaging device. In the video display, the following defects are often observed: vertical and horizontal lines, local spots and stripes. Their causes were analyzed by optical microscopy, chemical etching and EBIC (electron beam induced current). It is confirmed that they are related to the defects existing in the oxide layer and the polysilicon, the defects introduced into the silicon body during processing, and the defects existing in the starting material. They are discussed in detail as they relate to the raw materials, device processing steps, and the appearance of the images in the display output as a function of device operating conditions.