氩离子枪主要由离子源、加速电极、聚焦透镜和控制电源构成,可以产生并发射氩离子束,用于样品的表面清洁处理、表面刻蚀或深度分析,是表面分析和纳米科技装置中的重要构成之一。文章介绍国产氩离子枪的设计原理和测试结果,氩离子的加速电压可达2 kV,在工作距离150 mm和氩气分压为2.0×10-3Pa的情况下,可产生4.5mA的氩离子束流,束斑的直径在10—20 mm之间可调。 Argon ion guns are mainly composed of an ion source, an accelerating electrode, a focusing lens, and a control power supply that generates and emits argon ion beams for surface cleaning, surface etching, or depth analysis of samples that are used in surface analysis and nanotechnology devices One of the important components. The article introduces the design principle and test results of domestic argon ion gun. The accelerating voltage of argon ion can reach 2 kV. Under the working distance of 150 mm and argon partial pressure of 2.0 × 10 -3 Pa, argon ion can generate 4.5mA Beam, beam spot diameter adjustable between 10-20 mm.