,A cathodic arc enhanced middle-frequency magnetron sputter system for deposition of hard protective

来源 :核技术(英文版) | 被引量 : 0次 | 上传用户:xzm191213
下载到本地 , 更方便阅读
声明 : 本文档内容版权归属内容提供方 , 如果您对本文有版权争议 , 可与客服联系进行内容授权或下架
论文部分内容阅读
A new cathode arc enhanced magnetron sputter system for deposition of hard protective coatings is reported in this article. This system consists of eight targets: four outer targets are mounted on the wall of the chamber and four inner targets are placed around the center of the chamber. The outer and inner targets form four pair targets and are powered by four middle frequency power supplies. One of the outer targets can run either in the cathode arc mode or in the magnetron sputter mode. The Ti-containing diamond-like carbon nanocomposite coatings were deposited by using this system. The prepared coating exhibits high hardness (~20 Gpa), good adhesion (critical load is 50N), very low friction coefficient (~0.07), and excellent u-ibological performance with a wear rate of 1.4×10-16 m3·N-1·m-1.
其他文献
Objective: Stent placement is one of the main methods in the palliative treatment of malignant biliary obstruction, including plastic and self-expandable metal
企业进行套期保值的初始目的是规避风险,但金融衍生工具特有的杠杆作用,往往可能给保值头寸带来丰厚收益。不过这个收益经常变脸,成为插着鲜花的陷阱,可能让企业坠入深渊。
期刊
安徽省阜阳市自今年3月上旬以来首次爆发了肠道病毒(EV71)感染疫情。截至4月30日,已有1884名儿童感染肠道病毒(EV71),20人抢救无效死亡。传播范围扩大到全市下辖的各区县,并
Iron/polytetrafluoroethylene (Fe/PrFE) nanocomposites were prepared by means of high-energy ball milling for different lengths of time. Three new components of
期刊对基金资助课题成果的刊出情况是期刊学术质量的一种表现。基金资助课题的论文在本刊享有“优先用稿”的待遇。欢迎广大作者踊跃向本刊投寄各类基金课题论文,在来稿时请
2011年4月,南京军区联勤部药品仪器检验所卫生装备检验检测业务在全军军区级卫生装备检修机构率先通过了国家质量技术监督部门组织的计量认证考核,包括医用核磁共振(MRI)、计
基本特色:休闲娱乐。功能定位:主题性休闲娱乐购物、居住、办公协和城地区处于南京西路的最西端,这一地块可分成西南、西北两块。西南地块(上海文艺中心地块):东起自乌鲁木齐