用湿法涂布的方式制备了ITO透明导电膜,考察了不同热处理条件对ITO薄膜性能的影响。结果表明,随着热处理温度的升高,ITO薄膜的导电性和透光性均逐渐增强;随着热处理时间延长,ITO透明导电膜的电阻率表现出先增强后减弱的趋势,透光率随着热处理时间延长而增强到某一程度后,继续延长热处理时间其透光率保持不变;真空环境有利于提高ITO透明导电膜的导电性。 ITO transparent conductive films were prepared by wet coating. The effects of different heat treatment conditions on the properties of ITO films were investigated. The results show that with the increase of heat treatment temperature, the electrical conductivity and light transmittance of ITO films are gradually increased. With the prolongation of heat treatment time, the resistivity of ITO transparent conductive films tends to increase first and then decrease, After the heat treatment time is prolonged and enhanced to a certain extent, the light transmittance of the ITO film is kept unchanged by prolonging the heat treatment time; and the vacuum environment is favorable for improving the conductivity of the ITO transparent conductive film.