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半导体器件寿命试验中,通常要记录试验条件(应力)、试验初始样品数、失效器件数和相应的器件失效时间,以及器件性能参数的变化等数据。但在估计器件失效规律和可靠寿命时关键的数据是器件的失效数和相应的失效时间。如果这些数据本身存在误差,将使试验结果产生误差,导致估计的错误。影响试验结果的因素很多,如:产品的离散情况、试验条件的控制精度、测试仪器的精度、器件失效时间判定的准确度、以及人的因素等原因。本文仅就器件失效时间判定问题产生的误差进行讨论,假设其余因素均不产生误差。器件的失效规律假设为通常的 Weibull 分布,可靠函数为:
Semiconductor device life test, usually to record the test conditions (stress), the initial test samples, the number of failure devices and the corresponding device failure time, as well as changes in performance parameters of the device and other data. However, the key data for estimating device failure behavior and reliable lifetime is the number of device failures and the corresponding failure time. If there is an error in the data itself, the test result will be inaccurate, resulting in an estimation error. There are many factors that affect the test results, such as: discrete products, test conditions control accuracy, test equipment accuracy, device failure time to determine the accuracy, as well as human factors and other reasons. This article discusses only the error caused by device failure time to determine the problem, assuming that the rest of the factors do not produce errors. The failure law of the device is assumed to be the usual Weibull distribution. The reliable function is: