Computational analysis of electrostatic microelectromechanical systems (MEMS) requires an electrostatic analysis to compute the electrostatic forces acting on micromechanical structures and a mechanical analysis to compute the deformation of micromechanical structures.Typically,the mechanical analysis is performed on an undeformed geometry.However,the electrostatic analysis is performed on the deformed position of microstructures.In this paper,a new efficient approach to self-consistent analysis of electrostatic MEMS in the small deformation case is presented.In this approach,when the microstructures undergo small deformations,the surface charge densities on the deformed geometry can be computed without updating the geometry of the microstructures.This algorithm is based on the linear mode shapes of a microstructure as basis functions.A boundary integral equation for the electrostatic problem is expanded into a Taylor series around the undeformed configuration,and a new coupled-field equation is presented.This approach is validated by comparing its results with the results available in the literature and ANSYS solutions,and shows attractive features comparable to ANSYS. Computational analysis of electrostatic microelectromechanical systems (MEMS) requires an electrostatic analysis to compute the electrostatic forces acting on micromechanical structures and a mechanical analysis to compute the deformation of micromechanical structures.Typically, the mechanical analysis is performed on an undeformed geometry. Powered, the electrostatic analysis is performed on the deformed position of microstructures. In this paper, a new efficient approach to self-consistent analysis of electrostatic MEMS in the small deformation case is presented. This approach, when the microstructures under small deformations, the surface charge densities on the deformed geometry can be computed without updating the geometry of the microstructures. This algorithm is based on the linear mode shapes of a microstructure as basis functions. A boundary integral equation for the electrostatic problem is expanded into a Taylor series around the undeformed configuration, and a new coupled-field e quation is presented. This approach is validated by comparing its results with the results available in the literature and ANSYS solutions, and shows attractive features comparable to ANSYS.