5.声表面波加速度传感器处于加速度场中的物体都要受到惯性力的作用,这是物理力学的基本概念,所以制作的SAW振荡器的基片受到这种惯性力的作用而发生形变,使声表面波传播速度产生变化,从而导致振荡器的频率变化.基片自身的质量小,所以要外加惯性质量块,才能大大提高灵敏度.过去几年中,已经设计并试制了四种不同结构的SAW加速度计,并研究了它们各自的特性.四种结构虽不同,但所受到的惯性力有二类情况:一类是感受器件受 5. SAW acceleration sensor in the acceleration field of the object subject to the inertia force, which is the basic concept of physical mechanics, so the SAW oscillator made of the substrate by the inertia force of the role of deformation, so that Surface acoustic wave propagation velocity changes, resulting in changes in the frequency of the oscillator. The substrate itself is of low quality, so that the addition of inertial mass can greatly increase the sensitivity over the past few years, has been designed and trial production of four different structures SAW accelerometers, and studied their respective characteristics.Although the four structures are different, but the inertial force suffered two kinds of situations: one is the feeling of the device by