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首次研究了用PECVD方法制作的氮氧化硅光波导在超大规模集成电路光互连中的应用。以光致抗蚀剂波导为例,初步探讨了有机物和聚合物在光互连中的应用前景,并指出了现存问题及发展方向。
The application of silicon oxynitride optical waveguide made by PECVD method in the optical interconnection of very large scale integrated circuits was first studied. Taking the photoresist waveguides as an example, the application prospects of organic materials and polymers in optical interconnection are discussed preliminarily, and existing problems and development directions are pointed out.