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根据针-板放电5kW横流CO2激光器的结构特点,设计并实验研究了直角锥面镜作为全反射镜的谐振腔。在菲涅耳-基尔霍夫理论的基础上,引入柯林斯公式并考虑增益影响,推导了锥面谐振腔的衍射积分方程,并进行了相应的模拟计算。研究结果表明,在高功率横流CO2激光器中锥面反射镜与平面输出镜相配合使用组成稳定腔,获得了TEM30的低阶模输出;由于锥面反射镜受加工精度的影响中心残留有加工盲孔,导致TEMmn(m=0,n≠0)的模损耗较大不易耦合输出;而镜面中心场分布很弱的其他低阶模因损耗小,则会优先输出。
According to the structural characteristics of the pin-plate discharge 5kW cross-flow CO2 laser, a right-angle conical mirror was designed and experimentally studied as the resonant cavity of the total reflection mirror. Based on the Fresnel-Kirchhoff theory, the Collins formula is introduced and the influence of the gain is considered. The diffraction integral equation of the cone resonator is deduced and the corresponding simulation calculation is carried out. The results show that in the high-power cross-flow CO2 laser, the conic mirror and flat output mirror are used together to form a stable cavity, and the low order mode output of the TEM30 is obtained. Due to the processing accuracy of the cone mirror, the processing center remains blind Holes, resulting in TEMmn (m = 0, n ≠ 0) mode loss larger coupling easy to output; and the mirror center field distribution of weak other low-order loss of mesogen, it will give priority to the output.